The main objective of this thesis is to utilize the self-sensing characteristic of a piezo-microgripper to achieve position control and force estimation.

The static model using Euler-Bernoulli method is derived. The maximum displacement and accessible force about z direction can be calculated. The dynamic model based on the Euler-Bernoulli model presents a precise description of the dynamic behavior of the system. This model consists of actuator and sensor equations.

Then, the methods of system identification are utilized to obtain the practical model of the microgripper. The hysteresis model will be established firstly, and a feedforward controller will be used to compensate the hysteresis effect with the Preisach model. And then, the open loop dynamic model and self-sensing model of the microgripper will be identified. The strain self-sensing method was built as the sensor to measure the deflection of the microgripper without using an external sensor. According to these models, the hybrid controller is designed to achieve position control and force estimation.

Finally, the microgripper is integrated into the three-degree-of-freedom micromanipulator to form a micromanipulation system.